Simulation Tools

In the course of its work Plasma Dynamics has developed an extensive
suite of workstation based codes which represent a powerful set of
numerical tools appropriate for the solution of a wide range of
problems that arise in the design of semiconductor manufacturing
tools. All of the simulations permit the modelling of 2D
cylindrically symmetric geometries with realistic shapes. Plasma
Dynamics is currently developing 3D field, flow, and plasma
simulations on a subcontracting basis.

• 2D and 3D time dependent, compressible fluid flow solver
• volumetric and surface chemistry packages
• 2D and 3D multispecies diffusion package
• 3D thermal conduction package
• 3D electromagnetic field solver
• Boltzmann equation solver and automated
  fitting packages for electron rates
• 3D, high pressure (0.5-760 torr), self consistent
  microwave plasma simulation which integrates previous modules
• 2D static magnetic sovler
• 2D electrostatic field solver
• 2D time dependent, local RF plasma code (fluid cold ions,
  Maxwellian electrons, 2D Cartesian geometry)
• 2D multi-species Monte Carlo ion and neutral particle transport code appropriate
  for low pressure ($<10$\ torr) reactors.
• Backside helium lateral transport code and wafer 2D thermal
  profile predictor for use in evaluating electrostatic chuck groove designs.

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